Publications

Tracing the Force-Displacement Characteristics of Non-Linear Microsystems by In-Situ Characterization

Schmitt, P. and Hoffmann, M.

IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES
Volume: 2022-January Pages: 691-694
DOI: 10.1109/MEMS51670.2022.9699564
Published: 2022

Abstract

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