Publications

Silver Thin-Film Electrodes Grown by Low-Temperature Plasma-Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

Hasselmann, T. and Misimi, B. and Boysen, N. and Zanders, D. and Wree, J.-L. and Rogalla, D. and Haeger, T. and Zimmermann, F. and Brinkmann, K.O. and Schädler, S. and Theirich, D. and Heiderhoff, R. and Devi, A. and Riedl, T.

ADVANCED MATERIALS TECHNOLOGIES
Volume: Pages:
DOI: 10.1002/admt.202200796
Published: 2022

Abstract

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