On the Multipole Resonance Probe: Current Status of Research and Development

Oberrath, J. and Friedrichs, M. and Gong, J. and Oberberg, M. and Pohle, D. and Schulz, C. and Wang, C. and Awakowicz, P. and Brinkmann, R.P. and Lapke, M. and Mussenbrock, T. and Musch, T. and Rolfes, I.

Volume: Pages:
DOI: 10.1109/TPS.2021.3113832
Published: 2021

During the last decade a new probe design for active plasma resonance spectroscopy, the multipole resonance probe (MRP), was proposed, analyzed, developed, and characterized in two different designs: the spherical MRP (sMRP) and the planar MRP (pMRP). The advantage of the latter is that it can be integrated into the chamber wall and can minimize the perturbation of the plasma. Both designs can be applied for monitoring and control purposes of plasma processes for industrial applications. As usual for this measurement technique, a mathematical model is required to determine plasma parameter (electron density, electron temperature, and collision frequency of electrons with neutral atoms) from the measured resonances. Based on the cold plasma model a simple relationship between the resonance frequency and the electron density can be derived and leads to excellent measurement results. However, a simultaneous measurement of the electron temperature in low-pressure plasmas requires a kinetic model, because the half-width of the resonance peak is broadened by kinetic effects. Such a model has been derived and first results show the broadening of the spectra as expected. Deriving a relation between the half-width and the electron temperature will allow the simultaneous measurement and an improvement of monitoring and control concepts. IEEE

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