Publications

Low-temperature ALD/MLD growth of alucone and zincone thin films from non-pyrophoric precursors

Philip, A. and Mai, L. and Ghiyasi, R. and Devi, A. and Karppinen, M.

DALTON TRANSACTIONS
Volume: 51 Pages: 14508-14516
DOI: 10.1039/d2dt02279f
Published: 2022

Abstract

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