Highly Selective Guiding Springs for Large Displacements in Surface MEMS

Schmitt, P. and Schmitt, L. and Tsivin, N. and Hoffmann, M.

Volume: 30 Pages: 597-611
DOI: 10.1109/JMEMS.2021.3074822
Published: 2021

In this paper we introduce the concept, modelling and analysis of triangular and sinusoidal springs intended for large in-plane translational displacements for MEMS-guiding applications. The proposed spring systems combine the advantages of minimal space requirement, low stiffness in the axial direction and high mechanical resistance in off-axis directions. An analytical model for the description of the force-displacement characteristic of triangular springs is derived considering typical mechanical constraints. Based on the model, geometrical parameters of the springs influencing linearity and selectivity with respect to the in- and off-axis stiffness are analyzed. The validity of the models is demonstrated by finite element analysis and experimental verification realized by silicon-on-insulator demonstrators. [2020-0360] © 1992-2012 IEEE.

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