Confocal laser scanning holographic microscopy of buried structures

Schnitzler, L. and Neutsch, K. and Schellenberg, F. and Hofmann, M.R. and Gerhardt, N.C.

Volume: 60 Pages: A8-A14
DOI: 10.1364/AO.403687
Published: 2021

In this paper, we present a confocal laser scanning holographic microscope for the investigation of buried structures. The multimodal system combines high diffraction limited resolution and high signal-to-noise-ratio with the ability of phase acquisition. The amplitude and phase imaging capabilities of the system are shown on a test target. For the investigation of buried integrated semiconductor structures, we expand our system with an optical beam induced current modality that provides additional structure-sensitive contrast. We demonstrate the performance of the multimodal system by imaging the buried structures of a microcontroller through the silicon backside of its housing in reflection geometry. © 2020 Optical Society of America

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