Publications

Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties

Oellers, T. and Arigela, V.G. and Kirchlechner, C. and Dehm, G. and Ludwig, Al.

ACS COMBINATORIAL SCIENCE
Volume: 22 Pages: 142-149
DOI: 10.1021/acscombsci.9b00182
Published: 2020

Abstract
A photolithographic process for the rapid fabrication of thin-film tensile-test structures is presented. The process is applicable to various physical vapor deposition techniques and can be used for the combinatorial fabrication of thin-film tensile-test structure materials libraries for the high-throughput characterization of mechanical properties. The functionality of the fabrication process and the feasibility of performing high-quality measurements with these structures are demonstrated with Cu tensile-test structures. In addition, the scalability from unary structures to libraries with compositional variations is demonstrated. Copyright © 2020 American Chemical Society.

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