Theoretical investigation of a miniature microwave driven plasma jet

Klute, M. and Porteanu, H.-E. and Stefanović, I. and Heinrich, W. and Awakowicz, P. and Brinkmann, R.P.

Volume: 29 Pages:
DOI: 10.1088/1361-6595/ab9483
Published: 2020

Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which - transferred to the plasma via induction - provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of n e ≈ 5 × 1017 m-3, and the inductive H-mode with densities of n e 1019 m-3. The E to H transition shows a pronounced hysteresis behavior. © 2020 The Author(s). Published by IOP Publishing Ltd.

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