Publications

Structural reproducibility enhancement of optical resonance arrays produced by two-photon polymerization

Saetchnikov, A. and Saetchnikov, V. and Tcherniavskaia, E. and Ostendorf, A.

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND EUROPEAN QUANTUM ELECTRONICS CONFERENCE, CLEO/EUROPE-EQEC 2019
Volume: Pages:
DOI: 10.1109/CLEOE-EQEC.2019.8872958
Published: 2019

Abstract
Two-photon polymerization (2PP) is a promising additive manufacturing technology for 3D objects fabrication with high optical quality by structuring them without any special requirements (e.g. masks, molds, vacuum) and with spatial resolution below 100 nm [1]. However, just a 10-2-order refractive index difference between the substrate and photoresin may already cause the corruption of the structures that are few tens of micrometers high. Although tuning of the photoresin refractive index can benefit for reproducibility, the arising uncertainty in the substrate/photoresin interface localization leads then to corruption or even absence of the structure [2]. © 2019 IEEE.

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