Optical metrology for the investigation of buried technical structures

Göring, L. and Finkeldey, M. and Schellenberg, F. and Brenner, C. and Hofmann, M.R. and Gerhardt, N.C.

Volume: 85 Pages: 104-110
DOI: 10.1515/teme-2017-009
Published: 2018

In this paper, we present different optical metrology approaches for the investigation of buried technical structures. Contactless, potentially fast and non-destructive techniques such as optical beam induced current (OBIC), confocal laser scanning microscopy (CLSM) and digital holographic microscopy (DHM) are described. Their properties are illustrated by investigating the buried structures of a microcontroller. © 2017 Walter de Gruyter Berlin/Boston.

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