Publications

Modelling of direct laser writing in multilayer absorbing medium

Saetchnikov, A. and Tcherniavskaia, E. and Saetchnikov, V. and Ostendorf, A.

PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Volume: 11057 Pages:
DOI: 10.1117/12.2525730
Published: 2019

Abstract
A model that describes polymerization unit formation in multilayer absorbing medium for direct laser writing has been proposed. Properties of separate layers including surface roughness, illumination geometry, pulsed laser source and photosensitive material are parameters of the discussed model. A set of simulations has been carried out where the influence of the refractive indexes relation, layer thickness, roughness of the particular layers with respect to the structuring depth on the structure-model match and reproducibility has been analysed and discussed. © 2019 SPIE.

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