Publications

Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices

Porteanu, H.-E. and Stefanovic, I. and Klute, M. and Brinkmann, R.-P. and Awakowicz, P. and Heinrich, W.

IEEE INTERNATIONAL PULSED POWER CONFERENCE
Volume: 2019-June Pages:
DOI: 10.1109/PPPS34859.2019.9009698
Published: 2019

Abstract
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure. © 2019 IEEE.

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