Femtosecond laser crystallization of amorphous titanium oxide thin films

Hoppius, J.S. and Bialuschewski, D. and Mathur, S. and Ostendorf, A. and Gurevich, E.L.

Volume: 113 Pages:
DOI: 10.1063/1.5027899
Published: 2018

In this paper, we demonstrate experimentally that crystalline phases appear in amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous titanium thin films were produced by plasma-enhanced chemical vapor deposition and exposed to femtosecond laser pulses. Formation of a rutile phase was confirmed by X-ray diffraction, Raman measurements, and electron backscattering diffraction. A range of processing parameters for the crystallization is reported, and possible background mechanisms are discussed. © 2018 Author(s).

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