Publications

Emulation of Spatially Distributed Plasma Density Profiles in 3D Electromagnetic Field Simulations

Hattenhorst, B. and Pohle, D. and Schulz, C. and Rolfes, I. and Musch, T.

IMWS-AMP 2019 - 2019 IEEE MTT-S INTERNATIONAL MICROWAVE WORKSHOP SERIES ON ADVANCED MATERIALS AND PROCESSES FOR RF AND THZ APPLICATIONS
Volume: Pages: 166-168
DOI: 10.1109/IMWS-AMP.2019.8880104
Published: 2019

Abstract
In this contribution, we introduce three dimensional electromagnetic field simulations for spatially distributed plasma density profiles. Basis for these simulations is a macro-based generation of a locally discretized and dispersive plasma environment that ensures a fast and parameterizable creation while keeping computational time reasonable in simulation tools like CST Microwave Studio. Moreover, measurements with a multipole resonance probe inside of a double inductively coupled plasma reactor confirm the introduced emulation approach. © 2019 IEEE.

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