Publications

Direct Binary Encoding of Displacements on the Nano-Scale

Schmitt, P. and Hoffmann, M.

PROCEEDINGS OF THE IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
Volume: 2020-January Pages: 677-680
DOI: 10.1109/MEMS46641.2020.9056116
Published: 2020

Abstract
We present a passive force and displacement sensor based on a compliant mechanical amplifier combined with a micromechanical analog-to-digital converter that allows to amplify and convert a displacement signal in the nanometer range directly into an electrically readable binary code without the need of electrical energy for the conversion itself. The presented compliant amplifier achieves a displacement amplification ratio of about 100 within an input range of 1.3μ m, which enables a resolution of 40 nm steps by using a 5-bit mechanical analog-to-digital converter. Furthermore, a method is proposed to implement a pre-defined transfer function into the mechanical A/D converter in order to linearize or benchmark a non-linear primary displacement signal. © 2020 IEEE.

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